JOB DESCRIPTION

About the Role

We are seeking a highly experienced and technically driven Senior Development Engineer to lead the development, productization, and support of electrostatic chucks and related subsystems for Axcelis Purion ion implantation systems.

This role requires expertise in electrostatic chuck technologies, associated control systems (including power supplies and heater controllers), surface coatings, and wafer particle/contamination management. The engineer will own ESC development from concept through production qualification, working closely with cross‑functional teams and external suppliers to deliver robust, high‑performance solutions.
 

Key Responsibilities

• ESC Productization and Development

• Own ESC development activities from design through production qualification.

• Lead change notices (CNs), engineering change orders (ECOs), and related PLM processes.

• Drive ESC testing, validation, and qualification activities.

• Lead particle and metals Continuous Improvement Projects (CIPs).

• Develop and maintain comprehensive technical documentation.

• Field Support and Issue Resolution

• Provide expert-level field support for ESC-related issues.

• Lead root cause analysis and resolution of field issues.

• Perform on-tool testing and validation activities in support of issue resolution.

• Partner with suppliers on ESC corrective and preventive actions.

• Technology and Supplier Development

• Collaborate with technology development teams to define production requirements for suppliers.

• Support coating supplier development and qualification efforts.

• Conduct new supplier audits and ongoing supplier evaluations.

• Drive ESC CIPs in collaboration with key suppliers.

• Controls and Systems Integration

• Work closely with controls teams on ESC chuck/dechuck functionality and thermal (heating/cooling) control systems.

• Communication, Teamwork and Leadership

• Present technical data, analysis, and recommendations to executive leadership and customers.

• Collaborate effectively across engineering, manufacturing, quality, and supply chain teams.

• Travel

• Travel domestically and internationally as required (approximately 10–25%).
   

Requirements

• Experience in electrostatic chuck development for semiconductor wafer processing equipment.

• Strong working knowledge of coating technology and materials characterization

• Strong understanding of semiconductor vacuum systems and wafer processing fundamentals.

• In-depth knowledge of high-voltage electrical systems and ESC controls architecture.

• Proven experience with product lifecycle management (PLM), CN/ECO release processes, and related tools.

• Demonstrated ability to manage and collaborate with domestic and international suppliers.

• Working knowledge of applicable safety and compliance standards (UL, IEC, NFPA, SEMI).

• Excellent written and verbal communication skills with strong cross-functional collaboration capabilities.

• Working knowledge of structured problem solving methods.

• Ability to thrive in a fast-paced, hands-on development environment.

• Willingness and ability to work in a cleanroom environment.

• Ability to work onsite at the Beverly, MA location 3-5 days per week.
   

Education Requirements

Master’s or PhD degree in Physics or Engineering. Bachelors with relevant capabilities and experience will be considered.
 

Experience Requirements

Minimum 5+ years in electrostatic chuck development in a leading semiconductor equipment company.
 

Preferred Experience

• Working experience with CAD packages such as CREO/Windchill

• Matlab, Python or equivalent

• JMP, Mini-tab or equivalent statistical data analysis programs

• Working knowledge of materials characterization techniques

EQUAL OPPORTUNITY STATEMENT

It is the policy of Axcelis to provide equal opportunity in all areas of employment for all persons free from discrimination based on race, sex, religion, age, color, national origin, disability status, medical condition (including pregnancy), veteran status, sexual orientation, marital status, or any other characteristic protected by federal, state or local law.  Axcelis will provide reasonable accommodation necessary to enable a disabled candidate or employee to perform the essential functions of the position, unless the accommodation would create an undue hardship for the Company.
 

U.S. BASE SALARY RANGE

$115,513.20 - $173,269.80

This base salary range reflects the typical compensation for this role across U.S. locations.

Our salary ranges are determined by role and level; individual pay is determined based on

multiple factors, including job-related skills, experience, relevant education or training, work

location, and internal equity. The range provides the opportunity for growth and progression as

you develop within the role.

Base pay is one part of our U.S. total compensation package which includes eligibility in the

Axcelis Team Incentive bonus plan, and comprehensive benefits package (for regular

employees working 20+ hours a week).